MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19960105360-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09293705(A)	申请公布日期	1997.11.11
申请号	JP19960105360	申请日期	1996.04.25
申请人	TOSHIBA CORP	发明人	HIGUCHI KATSUTOSHI
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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