| 摘要 |
A positioning stage device capable of regulating in a wide range the rotational angle of a Z-stage supporting a suction chuck. The suction chuck is constructed integrally with the Z-stage, which is supported by a bearing so as to be movable along the Z-axis and rotatable about the Z-axis. A rotation stopper plate integral with the Z-stage is supported on both faces by bearing pads of an air bearing supported by a rotary ring, and is rotated about the Z-axis together with the air bearing by means of a motor, whereby the rotational angel of the Z-stage is regulated.
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