发明名称 SEMICONDUCTOR CLEAVAGE BREAKER DEVICE EQUIPPED WITH FREELY SWINGABLE STAGE
摘要 <p>PROBLEM TO BE SOLVED: To enable a stage to be continuously, finely, and easily controlled in angle by a method wherein a shaft is set freely swingable by a ball bearing continuously connected to its one end, and the other end of the shaft is moved by a moving mechanism. SOLUTION: A ball bearing 5 is composed of a ball slide 5a fixed to or formed in one piece with a shaft 4 and a spherical surface bearing 5b fixed in a case 20. The ball slide 5a is slid coming into contact with the spherical surface bearing 5b, whereby the shaft 4 is made tilted at an optional angle with a horizontal plane within a swingable range 30. A moving mechanism is formed of a slide ball 6 which is formed in one piece with the shaft 4 and made to slide coming into contact with a concave spherical surface 7A inside a slide coupler 7, and the slide coupler 7 is slid in a vertical direction inside a stationary coupler 9. By this setup, a stage 2 can be continuously, finely, and easily controlled so as to make an optional angle with a horizontal plane.</p>
申请公布号 JPH09293694(A) 申请公布日期 1997.11.11
申请号 JP19960106594 申请日期 1996.04.26
申请人 SONY CORP 发明人 KIYOKAWA AKIKAZU;YOSHINO TERUHIKO
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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