MANUFACTURE OF PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a pressure sensor in which the solderability between a glass pedestal and a pressure inlet pipe is improved to surely join them, so that an airtightness failure is never caused. SOLUTION: A pressure inlet pipe 1 having an one-way orthogonal surface 12 to the axis of a through-hole 11 for introducing a fluid with pressure and a terminal 2 for transmitting the electric signal from a pressure sensor chip 6 are plated. The pressure inlet pipe 1 and the terminal 2 are airtightly sealed into a base 4 with a low melting point glass 3 melted at a temperature lower than the melting point of the plating metal. One metallized surface orthogonal to the axis of a shaft hole 51 of a glass pedestal 5 having the other surface joined to the pressure sensor chip 6 is joined to the one-way orthogonal surface 12 of the pressure inlet pipe 1 by solder so that the respective axes are mutually matched. The electrode provided on the pressure sensor chip 5 is electrically connected to the terminal 2 by a wire.