| 摘要 |
PROBLEM TO BE SOLVED: To accurately form a light emitting layer with various patterns by laminating films of an anode, an organic material, a cathode, and a protection film on a light transmissive substrate, then dry-etching with resist. SOLUTION: An anode 2, one or more organic light emitting materials 3, a cathode material 4, and a protecting film 5 are laminated on a light transmissive glass substrate 1 in order. Resist 6 is formed on the protecting film 5, and a resist film 6a is formed with the resist 6. The films 2, 3, 4, 5 laminated on the glass substrate 1 are dry-etched by reactive ion etching to form the pattern of an organic EL element corresponding to the cathode 4. This process is repeated if necessary, and the pattern corresponding to the desired light emitting layer is formed. When the resist film 6a is formed, the protecting film 5 protects the films, and thereby, since the organic material does not come in contact with solvent or water, deterioration of the light emitting layer is prevented, and accurate patterns of the organic material 3, the cathode 4, and the protection film 5 are formed at the same time. |
