DEAERATIOH SYSTEM AND TREATING LIQUID FEEDER

摘要

PROBLEM TO BE SOLVED: To stably perform deaeration of a liquid sent to a discharge part through a liquid sending route without being influenced by fresh air temperature. SOLUTION: A treating liquid of temperature T1 is fed to a buffer tank 4 from a treating liquid tank 1 through treating liquid feeding pipe 3. The treating liquid in the buffer tank 4 is kept at temperature T2 higher than temperature T1 by circulating warm adjusted water in warm adjusted water piping 5. The treating liquid in the buffer tank 4 is fed to a heat exchange tank 13 through treating liquid feeding piping 9. The temperature of the treating liquid is adjusted to temperature T0 lower than temperature T1 by the heat exchange tank 13, and the treating liquid is fed to a discharge nozzle 16 through treating liquid feeding piping 14 covered with a thermal insulation 15 and is discharged to the surface of a substrate 100 from a discharge nozzle 16.