| 摘要 |
PROBLEM TO BE SOLVED: To obtain an accelerometer which is low-cost, whose mass-productivity and reliability are enhanced and whose surface mounting operation is performed easily by a method, wherein a cap is bonded onto mumerous G microsensors formed on a silicon wafer and a detection part is arranged in an airtight space. SOLUTION: An acceleration detection part 2 and a signal processing circuit part 3 are formed on a silicon plate 1, and a cap 13 is bonded by an adhesive 4 onto the silicon plate 1, in such a way that both are arranged inside an airtight space. In the detection part 2, a movable mask 8 which comprises slits 7 is supported by four beams 6, and end parts on one side of the beams 6 are formed so as to be fixed and bonded into the silicon plate 1 by fixation ends 5. Then, in the circuit part 3, a change on sizes of gaps 14, 15 conesponsing to the magnitude of an acceleration Gz is converted into an output signal which is proportional to the acceleration. Then, since the space 43 surrounding the detection part 2 is maintained airtight, it is possible top prevent dust particles from creeping into a gap part when a G microsensor is diced on a silicon wafer. In addition, when pads 9 are formed on the silicon plate 1, the surface mounting operation of an accelerometer to various substrates can be performed easily. |
