PLASMA GENERATING DEVICE,申请号JP19970028605-传众专利搜索

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发明名称	PLASMA GENERATING DEVICE
摘要
申请公布号	JPH09293682(A)	申请公布日期	1997.11.11
申请号	JP19970028605	申请日期	1997.02.13
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	HAYASHI SHIGENORI;NAKAGAWA HIDEO
分类号	H05H1/46;C23C16/50;C23F4/00;H01L21/205;H01L21/265;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/205;H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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