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发明名称
COATING DEVICE
摘要
申请公布号
JPH09293653(A)
申请公布日期
1997.11.11
申请号
JP19960102786
申请日期
1996.04.24
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
IZEKI IZURU;TAKAHASHI SATORU
分类号
G03F7/16;B05C5/02;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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