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发明名称
CHARGED PARTICLE-BEAM DRAWING DEVICE AND METHOD
摘要
申请公布号
JPH09293669(A)
申请公布日期
1997.11.11
申请号
JP19960107442
申请日期
1996.04.26
申请人
TOSHIBA CORP
发明人
YASUSE HIROTO;ABE TAKAYUKI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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