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发明名称
SEMICONDUCTOR MANUFACTURING METHOD
摘要
申请公布号
JPH09293728(A)
申请公布日期
1997.11.11
申请号
JP19960128952
申请日期
1996.04.25
申请人
RICOH CO LTD
发明人
YAMAMOTO NORIYOSHI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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