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发明名称
MANUFACTURING PROCESS FOR MOS LARGE-SCALE INTEGRATED CIRCUITS WITH PRECISION POLYSILICON RESISTORS
摘要
申请公布号
RU2095886(C1)
申请公布日期
1997.11.10
申请号
RU19930039176
申请日期
1993.07.29
申请人
AGRICH YURIJ V
发明人
AGRICH YURIJ V
分类号
H01L21/8232;(IPC1-7):H01L21/823
主分类号
H01L21/8232
代理机构
代理人
主权项
地址
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