| 摘要 |
<p>Method for manufacturing a composite membrane structure comprising a thin metal membrane, for example of silver, palladium or palladium alloys, for use in selective diffusion of gases. The metal material for the membrane is applied (3) by sputtering and/or vapor deposition as a coating (4) on a base member (1) having a low surface roughness, to a desired thickness of the resulting coating. The coating is pulled off from the base member so as to form the metal membrane (10), and the metal membrane is placed on a supporting substrate.</p> |
