| 发明名称 |
Output control method for excimer laser |
| 摘要 |
An output control method for an excimer laser includes providing plural light pulses, and changing an emission interval for the light pulses, wherein the emission interval is controlled so that an average laser output of each light pulse becomes higher than that when the emission interval is unchanged. |
| 申请公布号 |
EP0748009(A3) |
申请公布日期 |
1997.11.05 |
| 申请号 |
EP19960304045 |
申请日期 |
1996.06.04 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HASEGAWA, NORIYASU;OZAWA, KUNITAKA;KUROSAWA, HIROSHI;YOSHIMURA, KEIJI |
| 分类号 |
G03F7/20;H01S3/134;H01S3/225 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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