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发明名称
INTERATOMIC FORCE MICROSCOPE FOR SUBMERGED OBSERVATION AND SUBMERGED OBSERVATION METHOD FOR SURFACE OF SAMPLE
摘要
申请公布号
JPH09288116(A)
申请公布日期
1997.11.04
申请号
JP19960122176
申请日期
1996.04.19
申请人
NIKON CORP
发明人
WATANABE SHUNJI
分类号
G01B21/30;G01N37/00;G01Q20/04;G01Q30/14;G01Q60/24;G01Q60/32;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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