发明名称 COMPOSITION, PHOTOSENSITIVE COMPOSITION USING THE SAME, PHOTOSENSITIVE MATERIAL, PRODUCTION OF RELIEF PATTERN AND PRODUCTION OF POLYIMIDE PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a compsn., a photosensitive material, and a relief pattern having superior photosensitivity and shelf stability, and a polyimide pattern. SOLUTION: This compsn, constrains a dye compd. having adsorption at 420-600nm and a titanocene compd. represented by the formula (where each of R<3> to R<12> is H, halogen. 1-20C alkoxy or a heterocyclic group, separately).
申请公布号 JPH09288354(A) 申请公布日期 1997.11.04
申请号 JP19960101185 申请日期 1996.04.23
申请人 HITACHI CHEM CO LTD 发明人 KOJIMA YASUNORI;KAJI MAKOTO;HAGIWARA HIDEO;KATOGI SHIGEKI
分类号 G03F7/004;C09D4/00;C09D4/02;C09D179/08;G03F7/008;G03F7/027;G03F7/029;G03F7/031;G03F7/038;G03F7/40;H01L21/027;H01L21/312;(IPC1-7):G03F7/029 主分类号 G03F7/004
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