发明名称 |
COMPOSITION, PHOTOSENSITIVE COMPOSITION USING THE SAME, PHOTOSENSITIVE MATERIAL, PRODUCTION OF RELIEF PATTERN AND PRODUCTION OF POLYIMIDE PATTERN |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a compsn., a photosensitive material, and a relief pattern having superior photosensitivity and shelf stability, and a polyimide pattern. SOLUTION: This compsn, constrains a dye compd. having adsorption at 420-600nm and a titanocene compd. represented by the formula (where each of R<3> to R<12> is H, halogen. 1-20C alkoxy or a heterocyclic group, separately). |
申请公布号 |
JPH09288354(A) |
申请公布日期 |
1997.11.04 |
申请号 |
JP19960101185 |
申请日期 |
1996.04.23 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
KOJIMA YASUNORI;KAJI MAKOTO;HAGIWARA HIDEO;KATOGI SHIGEKI |
分类号 |
G03F7/004;C09D4/00;C09D4/02;C09D179/08;G03F7/008;G03F7/027;G03F7/029;G03F7/031;G03F7/038;G03F7/40;H01L21/027;H01L21/312;(IPC1-7):G03F7/029 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|