METHOD OF FORMING FILM,申请号JP19960122182-传众专利搜索

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发明名称	METHOD OF FORMING FILM
摘要
申请公布号	JPH09289203(A)	申请公布日期	1997.11.04
申请号	JP19960122182	申请日期	1996.04.19
申请人	SONY CORP	发明人	HARA MASATERU
分类号	H01L21/31;H01L21/316;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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