发明名称 Positive photoresist composition
摘要 Provided is a positive photoresist composition comprising (A) an alkali-soluble resin prepared by condensation of aldehydes and a mixture of phenols, which comprises (i) thymol, isothymol or a thymol-isothymol mixture and (ii) one or more of a phenol compound represented by the following formula (I); <IMAGE> (I) wherein R1, R2 and R3 are the same or different, and each of them represents a hydrogen atom or a methyl group, and optionally, as a third monomer, (iii) a phenol compound other than m-cresol; (B) 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonic acid esters as photosensitive agent; and (C) a low molecular weight compound having from 12 to 50 carbon atoms in all and from 2 to 8 phenolic hydroxy groups.
申请公布号 US5683851(A) 申请公布日期 1997.11.04
申请号 US19970784469 申请日期 1997.01.17
申请人 FUJI PHOTO FILM CO., LTD. 发明人 TAN, SHIRO;SAKAGUCHI, SHINJI
分类号 G03F7/004;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/023 主分类号 G03F7/004
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