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经营范围
发明名称
SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH09288990(A)
申请公布日期
1997.11.04
申请号
JP19960100157
申请日期
1996.04.22
申请人
JEOL LTD
发明人
SUEYOSHI TAKASHI
分类号
G01B21/30;G01N37/00;G01Q20/02;G01Q60/00;G01Q60/32;H01J37/28;(IPC1-7):H01J37/28
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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