| 摘要 |
PROBLEM TO BE SOLVED: To enhance the accuracy of the detected angular velocity of an angular velocity sensor. SOLUTION: In this angular-velocity sensor, a plurality of conducting patterns, which each comprise an electrode part 21 and a wiring part 22 connected to the electrode part 21 and are constituted of conductive material, are provided on the surface of a vibrating body 10 constituted of a piezoelectric material. A part of the conducting patterns is used for excitation, and a part of the conducting patterns is used for vibration detection at the same time. Thus, the angular velocity is detected. An insulating layer 31 and a shielding layer 33 are provided between the wiring part 22 of the conducting patterns and the vibrating body 10, and the vibrating body 10 is electrostatically shielded. Furthermore, the outer surface of the vibrating body 10 is covered with the insulating layer 31 and the shielding layer 32. Thus, the conducting pattern 20 is electrostatically shielded from the outside. Therefore, the effect of the noises caused by the excitation by the wiring part 22 and the noise detection and the effects of the noises caused by the external electromagnetic waves can be reduced, and the detecting accuracy of the angular-velocity sensor is improved. |
