| 摘要 |
PROBLEM TO BE SOLVED: To prevent binder components from being accumulated in the space between the furnace body and the table, etc., by forming a gas introducing passage for introducing a gas into a heating chamber, in the space between a furnace body and the periphery of a table on which an object to be treated is placed. SOLUTION: In this furnace, plural spiral heaters 4 are concentric-circularly arranged in a heating chamber 3 formed inside a furnace body 1 having an open bottom and atmospheric gas supply pipes 6 are arranged concentrically with the heaters 4. A table 10 which has a step section 11 in the peripheral part and is vertically movable, is placed at the bottom of the heating chamber 3 and a ceramic plate 12 for supporting a case in which an object to be treated is received, is horizontally supported on the table 10 through a support 13. Also, a gas introducing passage 18 for introducing the same kind of gas as the atmospheric gas is formed in the space C between the furnace body 1 and each of the horizontal surface 11a and vertical surface 11b of the step section 11. Further, the outer peripheral surface of the furnace body 1 is covered with an inside frame 20 and an outside frame 21 and an air chamber 22 having a discharge port 22a in the upper part and an air supply section 23 in the lower part is formed in the space between the inside frame 20 and the outside frame 21. |
