| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin workpiece carrier device capable of shortening a total workpiece carrying time. SOLUTION: This thin workpiece carrier device 20 includes first and second arms 3 and 4 and a robot hand 20. In the robot hand 20, hand arms 21, 22, 23 and 24, two each in back and forth directions with respect to carrying directions to cassettes C1 and C2 are disposed. A shaft part 25 is formed in the center part of the robot hand 20, and the robot hand 20 is disposed so as to be turned around the shaft part 25 by a prescribed angle against the second arm 4. Workpieces W are placed on the hand arms 21, 22, 23 and 24, and four workpieces are simultaneously carrier when the thin workpiece carrier device 20 moves to a next step cassette. |
