发明名称 Laser system with anamorphic confocal unstable resonator
摘要 The resonator of the laser system employs a pair of anamorphic mirrors in combination with a pair of anamorphic lenses. The lenses are positioned between the mirrors on opposing ends of a laser resonator cavity. In one embodiment, both the mirrors and lenses have cylindrical cross-sections with the lenses oriented at ninety degrees from the mirrors. In use, a laser pulse is generated within a lasing cavity between the lenses and mirrors. The anamorphic configuration of the lenses and mirrors operates to minimize any differences between the vertical and horizontal divergence of the beam. Preferably, the beam consists of a sequence of individual pulses with the lenses and mirrors configured to ensure that differences in divergence are substantially eliminated after a selected number of laser pulse bounces. Method and apparatus embodiments are described herein.
申请公布号 US5684822(A) 申请公布日期 1997.11.04
申请号 US19940341382 申请日期 1994.11.17
申请人 CYMER, INC. 发明人 PARTLO, WILLIAM N.
分类号 H01S3/08;(IPC1-7):H01S3/08 主分类号 H01S3/08
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