| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of scratches at the time of starting polishing even if abrasive grains small in diameter are used. SOLUTION: In this polishing method, polishing is performed by pressing a material 4 to be polished to a polishing tool 2 via abrasives 1 and moving the tool 2 relatively to the material 4 to be polished. In this case, for the abrasives 1, abrasives made by mixing abrasive grains harder than the material 4 to be polished and particles larger in diameter than the abrasive grains at the time of starting polishing and smaller in diameter than the abrasive grains at the end of polishing are used. |
