| 摘要 |
PROBLEM TO BE SOLVED: To feed and get wafers to and from a working suction stage stably, without exerting a useless external force on the waters, by pushing back the wafers to the working suction stage and getting them from this stage. SOLUTION: A feed claw 116 of a first feed claw arm 114 pushes back a wager 1 in a position adjusting suction stage 21 to mount the wafer on a working suction stage 46 via a stopper 39. A feed claw 117 if a second feed claw arm 115 pushes back wafer 1 on a mount 70. A third feed claw 125 pushes back a wafer 1 on the mount 70 to house it in an unloader magazine 16. Thus, it is possible to feed and get the wafer to and from the working suction stage stably, without exerting a useless eternal force on the wafer.
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