FORMATION OF SOI SUBSTRATE AND GRINDING DEVICE,申请号JP19960092231-传众专利搜索

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发明名称	FORMATION OF SOI SUBSTRATE AND GRINDING DEVICE
摘要
申请公布号	JPH09283473(A)	申请公布日期	1997.10.31
申请号	JP19960092231	申请日期	1996.04.15
申请人	SONY CORP	发明人	HASHIMOTO MAKOTO
分类号	H01L21/762;H01L21/02;H01L21/304;H01L21/306;H01L21/76;H01L27/12;(IPC1-7):H01L21/304	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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