ACTIVE MATRIX SUBSTRATE AND ITS PRODUCTION AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a liquid crystal cell of an active matrix type which embodies a high opening rate and a good display grade. SOLUTION: At the time of subjecting interlayer insulating films 9 consisting of thermosetting resin to patterning of contact holes 10 and to thermosetting in a process for producing an active matrix substrate constituting liquid crystal cells, the temp. gradient from room temp. to a baking temp. is specified to <=10 deg.C/min, by which the angleθof inclination of the slopes of the contact holes 10 is controlled to a range of 45 to 60 deg..