| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor wafer detecting device with which the presence/absence of a semiconductor wafer housed in a casette, its height and inclination can be detected accurately. SOLUTION: A vertically moving arm, having a light emitting part and a light receiving part 5, is arranged in a vertically movable manner on both sides of a casette 1 where a semiconductor wafer W is housed. An LED 14, as a light emitting means, and a lens 15, with which the light emitted from the LED 14 is converted to a parallel light, are arranged on the light emitting part 4, and a lens 16, with which the parallel light is condensed, and a CCD line senser 17, as an image input device, are arranged on the light receiving part 5. The lenses 15 and 16, a semiconductor wafer W and the CCD line senser 17 are arranged on the optical axis of the light emitted from the LED 14, and the picture of the semiconductor wafer W is displayed on the CCD line senser 17 by the light emitted from the LED 14. The whole picture of the semiconductor wafer W is image inputted, and the position, etc., of the entire semiconductor wafer W is accurately detected by the vertically moving arm which performs a reciprocating movement from the lower end to the top end of the casette 1.</p> |
