| 摘要 |
PROBLEM TO BE SOLVED: To discriminate leakage in a short time by automating the leakage amount confirming operation of a vacuum treating chamber after apparatus maintenance and alleviating the operator's man power. SOLUTION: In the case of leakage check, gas introducing valves 14A, 14B, exhaust valve 15 are closed to seal a vacuum treating chamber 11. The pressure value Pa at the time of starting the check is read, and stored in a register. Simultaneously, a timer is started. Differential pressure is calculated based on the pressure value P at the time of time-up. The differential pressure (Pa-P) is compared withΔP (reference value of the chamber), and if the pressure does not exceed the reference value, no leakage is discriminated. If not, the leakage failure is discriminated, and notified by a buzzer. The reference values of timer and pressure rise are previously set by an operator. It can be set at each vacuum treating chamber. The maintenance time can be shortened, and the operability of the apparatus is improved.
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