| 摘要 |
PROBLEM TO BE SOLVED: To reduce a setting time of a reticle by providing a magazine and a loader for a magazine which enable a plurality of reticle to be carried from a library to an intermediate place or in the opposite direction thereof at once. SOLUTION: When exposure is carried out, exposure data is set, a device is activated, a magazine 5a wherein a plurality of reticules 1 which are necessary for the present exposure are put is unloaded by a loader 87 for a magazine, carried to an intermediate place 6a positioned in an area neat a reticle table and a reticle changer and mounted. When the exposure of a production lot is finished and a following lot is exposed, the above carrying method is made reverse and the reticle 1 is nonleaded from a reticle table 2 by a loader 7 and returned to the magazine 5a in the intermediate place 6a Thereafter, the reticle 1 is moved in the intermediate place 6a to a delicate position with the loader 8 for a magazine on the stage 6b and is returned to a reticle library 9 through the loader 8. |
