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发明名称
MANUFACTURE AND INSPECTION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH09283529(A)
申请公布日期
1997.10.31
申请号
JP19970032111
申请日期
1997.02.17
申请人
TOSHIBA MICROELECTRON CORP;TOSHIBA CORP
发明人
MIYASHITA MORIYA;OGINO MASANOBU;HOSHI TADAHIDE;NUMANO MASAKUNI;SAMATA SHUICHI;SEKIHARA AKIKO;AKITA KEIKO
分类号
H01L21/66;H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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