发明名称 MICROSCOPE PROVIDED WITH LASER REPAIR FUNCTION
摘要 PROBLEM TO BE SOLVED: To provide a microscope provided with laser repair function capable of obtaining a good observation image. SOLUTION: A microscope observation optical path by which the observation image of the sample 25 is image-formed on a TV camera 31 and an eyepiece 32 through an objective lens 24 and an optical path for laser irradiation by which the laser light from the laser oscillating tube 33 is image-formed on the sample 25 through the lens 24 are switched by an optical path switching means 36 arranged just above and adjacent relation to the lens 24, so that a part shared by both optical paths is eliminated.
申请公布号 JPH09281396(A) 申请公布日期 1997.10.31
申请号 JP19960094241 申请日期 1996.04.16
申请人 OLYMPUS OPTICAL CO LTD 发明人 KANZAKI KAZUHIRO
分类号 G02B21/00;B23K26/00;B23K26/06;G02B21/18;H01L21/60 主分类号 G02B21/00
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