| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily measure the orthogonality of an interferometer mirror for measuring an X-axis position and an interferometer mirror for measuring a Y-axis position. SOLUTION: A stage 1 is provided with one mark AM1. The image of this mark AM1 is picked up by a CCD 7 via a pair of microscopes 6b, 6c installed at a prescribed spacing in the X-axis direction and the position thereof is detected. The image of the mark AM1 is picked up by the CCD 7 via a pair of the microscopes 6a, 6b installed at a prescribed spacing in the Y-axis direction and the position thereof is detected. The orthogonality of the interferometer mirror 5Xa for measuring the X-axis position and the interferometer mirror 5Ya for measuring the Y-axis position is calculated in accordance with the Y position of the mark AMI detected via the microscopes 6b, 6c and the X position of the mark AM1 detected via the microscopes 6a, 6b.</p> |
