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经营范围
发明名称
PATTERN INSPECTION APPARATUS
摘要
申请公布号
JPH09281053(A)
申请公布日期
1997.10.31
申请号
JP19960096569
申请日期
1996.04.18
申请人
NIPPON AVIONICS CO LTD
发明人
MATSUNO SHUZO
分类号
G01B11/24;G01N21/88;G01N21/89;G01N21/956;(IPC1-7):G01N21/88
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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