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发明名称
VAPOR GROWTH SYSTEM
摘要
申请公布号
JPH09283511(A)
申请公布日期
1997.10.31
申请号
JP19960114193
申请日期
1996.04.11
申请人
HITACHI ELECTRON ENG CO LTD
发明人
KUDO YUTAKA;KOMATSU NOBUHISA
分类号
C23C16/40;C23C16/44;C23C16/455;C23C16/50;H01L21/205;H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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