发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND RESIN TABLET WHICH IS USED FOR IT
摘要 PROBLEM TO BE SOLVED: To execute efficiently the removal of a volatile content in a tablet by a method wherein the sectional area, which intersects orthogonally the direction of movement of a plunger, of the tablet is set at a specified value of lower of the sectional area, which intersects orthogonally the direction of movement of the plunger, of a pot. SOLUTION: A resin tablet 21 is put in a previously heated mold pot 5. Top and bottom forces are made to approach each other, a sealed space comprising at least the pot and the molding surfaces of the forces is put in a reduced state, a clamping of the top and bottom forces is conducted, the tablet 5 is extruded in a molding cavity by a plunger 9 and the resin tablet is cured. The sectional area, of the tablet 21 which intersects orthogonally the direction of movement of the plunger 9, is set at 85% or lower of the sectional area of the pot 5, which intersects orthogonally the direction of movement of the plunger 9.
申请公布号 JPH09283550(A) 申请公布日期 1997.10.31
申请号 JP19960094169 申请日期 1996.04.16
申请人 TOSHIBA CORP 发明人 SUGIZAKI YOSHIAKI;MIYAMOTO TETSUYA
分类号 B29B9/08;B29C45/02;B29C45/14;B29L31/34;H01L21/56;(IPC1-7):H01L21/56 主分类号 B29B9/08
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