| 摘要 |
PROBLEM TO BE SOLVED: To make wirings which cause mirror reflection invisible when viewed from a substrate side and to improve characteristics by providing the TFT- corresponding regions of light shielding films formed on the lower layer of thin-film transistors(TFTs) with light transparent parts and forming the etching stopper layers of the reverse staggered type TFTs by self-alignment. SOLUTION: The light shielding films 2, scanning lines 3 and gate electrodes 4 are formed on a glass substrate as an array substrate and gate insulating films 5 are formed to cover these. Pixel electrodes 9, signal lines 12, source electrodes 10 and drain electrodes 11 are formed on the gate insulating films 5 and the TFTs are so formed that the source electrodes 10 are connected to the pixel electrodes 9. Further, an oriented film is formed thereon. The pixel regions and the regions formed with the TFTs are removed by etching to form the light transparent parts of the light shielding films 2. The etching stopper layers of the reversed staggered TFTs are formed in self-alignment with the gate electrodes 4 as a mask. As a result, the variations in the characteristics are eliminated and high-quality display is made possible. |
