| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical semiconductor device having high controllability and reliability. SOLUTION: The optical semiconductor device having the excellent controllability and reliability is manufactured by embedding optical waveguides 103, 104, 105 formed by selective growth with semiconductor crystals 109, 110 of p/n or high resistance while attaining decreased leak currents, low threshold value and high optical output. Waveguide structures are selectively grown to a mesa stripe shape by using a dielectric mask 102 windowed to a stripe form on a substrate 101. The dielectric mask 102 is removed and a dielectric mask 108 is formed again only on the upper parts of the mesa stripes. Finally, the side walls of the mesa stripes are embedded by the selective growth. |
