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发明名称
SCANNING TYPE PROBE MICROSCOPE
摘要
申请公布号
JPH09281118(A)
申请公布日期
1997.10.31
申请号
JP19960085427
申请日期
1996.04.08
申请人
OLYMPUS OPTICAL CO LTD
发明人
TAKENOBU TAKAAKI
分类号
G01B21/30;G01N37/00;G01Q60/34;G01Q90/00;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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