| 摘要 |
PROBLEM TO BE SOLVED: To prevent the excessive lowering of the resistance value of an insulating part even when the temperature rise of an electrostatic chuck, to improve the corrosion resisting property of the electrostatic chuck against the plasma of halogen gas, and to improve the mechanical strength and the thermal shock resistance of the electrostatic chuck. SOLUTION: This electrostatic chuck 8 is provided with an electrode 3 and insulating parts 1 and 2 which are formed on both sides of the electrode 3. At least the insulating part 1 on the side of an attracting surrace 6 consists of a composite sintered body. This composite sintered body contains aluminum oxide and silicon carbide, silicon carbide grains are brought into contact with each other through mullite material, and the cubical intrinsic resistance value in room temperature of the composite sintered body is between 1×10<8> and 1×10<15> Ω/cm. The desirable content of the silicon carbide in the composite sintered body is between 5 and 30wt.%, the mullite material in the composite sintered body is present as oxide of 0.1μm or smaller in thickness on the surface of the silicon carbide grains. |
