| 摘要 |
PROBLEM TO BE SOLVED: To easily and reliably convey and control cassettes, etc., in a clean room. SOLUTION: A cassette 1 for mounting and conveying works to be machined/ treated in a clean room. An electronic module 10 has a radio communication function, stores information e.g. codes for specifying works mounted in the cassette 1 and is settled at specified position of the cassette 1. A conveyer control and/or treating function for the cassette 1 and/or works mounted therein has a radio communication function for communicating with the module 10. This communication function reads the information stored in the module 10 and controls the conveying and/or treating of the cassette 1 and/or the works mounted therein. It is preferable to provide a function for rewriting the stored contents in the module 10 and use a card type for the module 10. The work conveying and treating system is composed of the above described functions. |
