| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce stess and thermal displacement in a table by a method wherein the table supported at the gravity center is driven without entacting. SOLUTION: A substantially triangular recess part is formed in the vicinity of a center of an upper face of an X stage 5, uncontactable actuator coils 12b, 12c are disposed at one angle part, and two pairs of actuators comprise these coils 12b, 12c and magnets 16b, 16c provided in a bottom face of a table 4. The table 4 is driven (leveling) in an inclined direction by two pairs of actuators 12b, 16b and 12c, 16c. Further, at a position corresponding to a gravity position 14 of the table 4 in the recess part of the X stage 5, a contact-type actuator 13a is provided and a weight of the table 4 is supported at one point. Thus, a large thrust is not required to give by these noncontact drive mechanisms 12a, 12b, 16a, 16b.</p> |
