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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09283758(A)
申请公布日期
1997.10.31
申请号
JP19960113198
申请日期
1996.04.10
申请人
SONY CORP
发明人
YAMAMURA YASUHIRO
分类号
H01L21/76;H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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