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发明名称
STRUCTURE OF ISOLATION FILM OF SEMICONDUCTOR ELEMENT AND FORMATION OF THE FILM
摘要
申请公布号
JPH09283615(A)
申请公布日期
1997.10.31
申请号
JP19960337696
申请日期
1996.12.04
申请人
L JII SEMICON CO LTD
发明人
ZON MUN CHIE
分类号
H01L21/314;H01L21/76;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/314
代理机构
代理人
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