发明名称 CHEMICAL FILTER AND METHOD FOR REPLACEMENT
摘要 PROBLEM TO BE SOLVED: To make good use of the adsorptive ability and enable lowering the running cost. SOLUTION: This chemical filter is made divisible in the direction of thickness into a plurality of pieces by use of one consisting of a plurality of thin type filters 1, 2 superposed one on the other. When the filter needs to be replaced, only the filter 1 on the upstream side, whose filtering capacity has degenerated, is discarded and the filter 2 on the downstream side is reused. Even when a filter is drawing to the end of life in effectiveness, the filter allows the remaining adsorptive ability to be used effectively so that as a whole waste can be reduced and the running cost, lowered.
申请公布号 JPH09280640(A) 申请公布日期 1997.10.31
申请号 JP19960089691 申请日期 1996.04.11
申请人 NIKON CORP 发明人 MATSUMOTO YUKAKO
分类号 B01D53/34;B01D53/81;F24F7/00;F24F13/28;G03F7/20;H01L21/02;H01L21/027 主分类号 B01D53/34
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