发明名称 |
TREATMENT OF GLASS SUBSTRATES TO COMPENSATE FOR WARPAGE AND DISTORTION |
摘要 |
A method for forming a substantially flat planar lightwave optical circuit which has a substantially flat planar silica substrate and a sintered glassy lightguiding layer over the silica substrate. The structure is given a post treatment at an elevated temperature for a time sufficient to flatten said structure and compensate for distortion. Alternatively, the silica substrate may be heated and presagged to a predetermined degree to compensate for distortion or warpage which will occur in later processing.
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申请公布号 |
CA2202216(A1) |
申请公布日期 |
1997.10.30 |
申请号 |
CA19972202216 |
申请日期 |
1997.04.09 |
申请人 |
CORNING INCORPORATED |
发明人 |
TROUCHET, DENIS M.;MASCHMEYER, RICHARD ORR;BOEK, HEATHER;BEGUIN, ALAIN MARCEL JEAN |
分类号 |
C03B19/06;C03B23/025;C03C17/02;C03C17/04;C03C17/23;G02B6/12;G02B6/13;G02B6/132;H01L27/14;(IPC1-7):C03B32/00;H01L33/00;H01L31/18 |
主分类号 |
C03B19/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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