发明名称 Piezoelectric thin-film component
摘要 The component comprises a substrate, a thin ferro-electric film which is formed through a Sol-Gel method on the substrate, and at least two upper electrodes arranged on the thin ferro-electric film. The thin ferro-electric film is a lead-titanate-zirconate or lead-titanate film which is polarized through applying a voltage at the upper electrodes.
申请公布号 DE19712496(A1) 申请公布日期 1997.10.30
申请号 DE19971012496 申请日期 1997.03.25
申请人 MITSUBISHI MATERIALS CORP., TOKIO/TOKYO, JP 发明人 YONEZAWA, TADASHI, OMIYA, SAITAMA, JP;TSUTSUMI, SHUJI, OMIYA, SAITAMA, JP;HANAJIMA, NAOYUKI, OMIYA, SAITAMA, JP;OGI, KATSUMI, OMIYA, SAITAMA, JP;HASHIMOTO, KEN-YA, CHIBA, JP
分类号 G06K19/067;G06K19/077;H03H9/02;H03H9/17;H03H9/25;H03H9/56;(IPC1-7):H01L41/107;H01L41/22;G06K19/07 主分类号 G06K19/067
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