Method of manufacturing a metallisation on a piezoelectric substrate

摘要

Producing a metallisation on piezoelectric substrates for surface wave devices involves: (a) applying a thin, continuous and mechanically stable base layer of a metal or alloy, which reacts with the substrate, onto the substrate by conventional thin film technology; and (b) applying an aluminium (alloy) layer. Pref. the base layer consists of titanium and the substrate consists of LiTaO3 or LiNbO3.