| 摘要 |
The method concerns sputter coating of workpieces (12), according to which two opposing surfaces (3a, 3b) are sputtered, and a gas stream (G) produced between these surfaces is directed against at least one workpiece. The opposing surfaces are surfaces with a closed configuration, while the gas stream is produced in a gap (5) with a closed configuration. Also claimed are a corresponding apparatus, and applications of the invention for coating of workpieces with dielectric and ferromagnetic materials. |
