| 摘要 |
PROBLEM TO BE SOLVED: To obtain a glassy carbon having a flexural strength of <=1,500kg/cm<2> and excellent erosion resistance to plasma sputtering and reaction is the case of using as a plasma etching electrode and generating little dust. SOLUTION: This glassy carbon is produced by using a high-molecular solid novolak phenolic resin having a methanol-soluble content of 20-80% as a raw material, mixing the raw material with 10-50% (outer percentage) of an organic solvent capable of dissolving the novolak phenolic resin or 20-100% (outer percentage) of a low-molecular novolak phenolic resin having a methanol-soluble content of >=85%, sufficiently degassing and deforming the mixture is vacuum or under reduced pressure, forming and curing the mixture at 120-180 deg.C and baking the cured product at >=2000 deg.C in an inert gas atmosphere by increasing the temperature at a rate of <=5 deg.C/hr within the temperature range of <=300 deg.C. |
